UV laser beam/YBCO target interaction for optimum preablation for the growth of YBCO thin films

C. Andreouli, S. Christoulakis, T. Efthimiopoulos, A. Tsetsekou, M. Holiastou, C. Panagopoulos
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引用次数: 5

Abstract

The morphological and compositional changes which take place during the laser irradiation of YBCO targets are discussed. The understanding of the evolution of target composition, will lead to better control of film quality. In the case stated here, a XeCl excimer laser was used to irradiate rotated and also non-rotated YBa2Cu3O7-x targets. The modified surface of these targets was systematically studied by scanning electron microscopy and energy dispersive x-ray microanalysis. It was observed that some crucial deposition parameters, such as the number of pulses and fluence has a strong effect on the roughening of the target. A comparative study was done on the derived High-Tc superconducting thin films. It was shown that the conditions during the preablation procedure which affect the target surface morphology correlate closely with the appearance of laser droplets on the film surface.
紫外激光束/YBCO靶相互作用对YBCO薄膜生长的最佳预烧蚀
讨论了激光照射YBCO靶材时所发生的形态和成分变化。了解目标成分的演变,将有助于更好地控制薄膜质量。在这里所述的情况下,XeCl准分子激光器被用来照射旋转和非旋转的YBa2Cu3O7-x目标。利用扫描电子显微镜和能量色散x射线显微分析系统地研究了这些靶标的修饰表面。结果表明,脉冲数和通量等关键沉积参数对靶材的粗化有较大影响。对所得的高温超导薄膜进行了对比研究。结果表明,预烧蚀过程中影响靶表面形貌的条件与薄膜表面激光液滴的形貌密切相关。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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