Characterization of thin film organic materials at high frequency

Abstract

By considering the potential variation of process parameters such as line width and dielectric thickness, several hybrid coplanar waveguide microstrip (CPWM) well matched lines were designed, fabricated and tested up to 6 GHz on a low loss thin film organic high density interconnect (HDI) substrate. The multiple CPWM lines were then used to characterize the thin film dielectric up to 6 GHz.