An Electrothermal Micromirror with J-shaped Bimorph Microactuators

Abstract

A tip-tilt-piston micromirror with four J-shaped bimorph microactuators is developed to increase robustness and stability. The diameter of the central mirror plate is 1 mm and the footprint of the entire device is only 1.6 × 1.6 mm2. The micromirror scans 3° (optical) at 2.8 Vdc. The piston mode and rotation mode are measured at 880 Hz and 1555 Hz, respectively.