A Novel CMOS MEMS Accelerometer with Four Sensing Finger Arrays

Abstract

This study presents a novel CMOS accelerometer with four sensing finger arrays. Moreover, additional springs are also employed for electrical routing. The sensing capacitance is increased for 80%, at the cost of the decreasing of proof mass for 20%. Thus, the sensitivity of the present accelerometer is still increased for near 44%. The measurement results show that the present accelerometer has a gain of 2.94 mV/g.