A. Madany, P. Jasiński, G. Jasinski, B. Chachulski, A. Nowakowski
{"title":"Preparation and properties of nanoporous alumina-based humidity sensors","authors":"A. Madany, P. Jasiński, G. Jasinski, B. Chachulski, A. Nowakowski","doi":"10.1117/12.721044","DOIUrl":null,"url":null,"abstract":"In this paper preparation method of nano-porous alumina based humidity sensors is presented. Investigation of relation between technological process parameters, sensor's porous layer structure and electric parameters is main aim of this study. Surface morphology was investigated by scanning electron microscopy. Impedance spectroscopy was used to identify electrical parameters of the sensor.","PeriodicalId":405495,"journal":{"name":"Optoelectronic and Electronic Sensors","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optoelectronic and Electronic Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.721044","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
In this paper preparation method of nano-porous alumina based humidity sensors is presented. Investigation of relation between technological process parameters, sensor's porous layer structure and electric parameters is main aim of this study. Surface morphology was investigated by scanning electron microscopy. Impedance spectroscopy was used to identify electrical parameters of the sensor.