Modelling of coplanar waveguide elements for 77-GHz - MMICs

Abstract

Efficient models for coplanar waveguide (CPW) discontinuities and junctions on Si substrate have been developed, which are suitable for W-band MMIC design. The models consist of line sections and lumped-element equivalent circuits and were derived by analytical extraction from Finite-Difference frequency domain calculations. They are validated by on-wafer measurements up to 90 GHz using test structures fabricated on silicon substrate.