A micromachined vibratory sub-wavelength diffraction grating laser scanner

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607847

Y. Du, Guangya Zhou, K. Cheo, Qingxin Zhang, H. Feng, F. Chau

引用次数: 0

Abstract

A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.

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一种微机械振动亚波长衍射光栅激光扫描仪

报道了一种新型的基于MEMS的面内振动亚波长衍射光栅扫描仪。实验结果表明，衍射效率大于75%，光学扫描角为13.7°，扫描频率为20.35 kHz。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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