Simulation-based evaluation of the ramp-up behavior of waferfabs

Abstract

In this paper we present a simulation study of wafer fab ramp-up scenarios with the simulation software AutoSched AP. A generic factory model (MIMAC 1 from Int. SEMATECH) was adapted to simulate fab ramp-up scenarios. The model was customized to consider time phased modeling capability and time phased reporting. Additionally, an evaluation approach for the comparison of different ramp-up simulation scenarios is presented. This approach helps to evaluate the ramp-up performance with different input parameters. A systematic variation of dispatch rules and lot sizes during ramp-up is shown.