Characterizations of elastic constants of transparent thin films deposited on substrates by laser ultrasonic method

Abstract

A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on substrates. The film/substrate samples are prepared by a RF magnetron sputtering technique. Teflon-like films, deposited on three kinds of substrates, silicone plates, glass and copper plates, have been studied and the related parameters have been evaluated.