GeSbSe Devices for Mid-Infrared Optical Sensing

M. Grayson, Gregory Krueper, Bo Xu, D. Hjelme, J. Gopinath, W. Park
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Abstract

We fabricated GeSbSe waveguides and resonators using e-beam lithography and achieved a propagation loss of 4.4 dB/cm in the mid-infrared region. Using these devices we demonstrated optical sensing of aromatic aldehydes with a limit of detection of 0.25 μmol/mL.
中红外光学传感用GeSbSe器件
我们利用电子束光刻技术制备了GeSbSe波导和谐振腔,在中红外区域的传输损耗为4.4 dB/cm。利用这些装置,我们证明了芳香醛的光学传感,检测限为0.25 μmol/mL。
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