Diffusion and Quantum Well Intermixing

T. Tabbakh
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引用次数: 1

Abstract

Diffusion or intermixing is the movement of particles through space. It primarily occurs in every form of matter because of thermal motion. Atom diffusion and intermixing can also happen in crystalline semiconductors whereby the atoms that are diffusing and intermixing move from one side of the lattice to the adjacent one in the crystal semiconductor. Atom diffusion, which may also involve defects (including native and dopant), is at the core of processing of semiconductors. The stages involved in semiconductor processing are growth, followed by post-growth, and then the construction stage comes last. The control of every aspect of diffusion is necessary to accomplish the required goals, therefore creating a need for knowing what diffuses at any point in time. This chapter will briefly summarize the techniques that are in existence and are used to create diffused quantum wells (QWs). Also, it will outline the examples of QW semiconductor lasers and light-emitting diode (LED) by the utilization of inter-diffusion techniques and give recent examples.
扩散和量子阱混合
扩散或混合是粒子在空间中的运动。它主要发生在每一种形式的物质中,因为热运动。原子扩散和混合也可以发生在晶体半导体中,其中扩散和混合的原子从晶体半导体中晶格的一侧移动到相邻的另一侧。原子扩散是半导体加工的核心,它也可能涉及到缺陷(包括原生缺陷和掺杂缺陷)。半导体加工涉及的阶段是成长阶段,其次是后期成长阶段,然后是构建阶段。要实现所需的目标,必须控制扩散的各个方面,因此需要了解在任何时间点扩散的内容。本章将简要总结现有的用于创建扩散量子阱(qw)的技术。此外,它将概述利用互扩散技术的量子w半导体激光器和发光二极管(LED)的例子,并给出最近的例子。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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