On optimal scheduling of semiconductor manufacturing system based on characteristic Petri net model

Abstract

The production process of semiconductor manufacturing system is very complex. To establish a reliable scheduling model of semiconductor manufacturing system is very important for testing the whole production line system, evaluating different scheduling schemes, and optimizing production resource scheduling. In this paper, a model of semiconductor manufacturing system based on characteristic Petri net is proposed. By simplifying the non main characteristic elements of Petri net model of semiconductor manufacturing system, the model can effectively overcome the danger of model scale expansion brought by basic Petri net in the case of complex system. Finally, the modeling of semiconductor manufacturing system and its calculation example are realized by the above modeling method.