Real time dispatch gets real time results

K. Appleton-Day, L. Shao
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引用次数: 11

Abstract

Since the on-line dispatch system is the primary method of prioritizing and directing the flow of work through a paperless fab, it makes sense that we place high demands on a dispatching tool. The demands were met by ASI's RTD system. The flexibility and customizability that RTD offers allows us to execute dispatch logic using real-time factory systems data. We can apply unique rules to accommodate unique tool requirements. With constantly evolving computer technology, we believe dispatching holds promising implications for the continuous improvement of wafer fabrication performance.
实时调度得到实时结果
由于在线调度系统是通过无纸化工厂优先排序和指导工作流程的主要方法,因此我们对调度工具提出高要求是有道理的。ASI的RTD系统满足了这些要求。RTD提供的灵活性和可定制性使我们能够使用实时工厂系统数据执行调度逻辑。我们可以应用独特的规则来适应独特的工具需求。随着计算机技术的不断发展,我们相信调度对晶圆制造性能的不断提高具有很好的意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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CiteScore
0.80
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0.00%
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