{"title":"Real time dispatch gets real time results","authors":"K. Appleton-Day, L. Shao","doi":"10.1109/ISSM.1997.664605","DOIUrl":null,"url":null,"abstract":"Since the on-line dispatch system is the primary method of prioritizing and directing the flow of work through a paperless fab, it makes sense that we place high demands on a dispatching tool. The demands were met by ASI's RTD system. The flexibility and customizability that RTD offers allows us to execute dispatch logic using real-time factory systems data. We can apply unique rules to accommodate unique tool requirements. With constantly evolving computer technology, we believe dispatching holds promising implications for the continuous improvement of wafer fabrication performance.","PeriodicalId":138267,"journal":{"name":"1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.1997.664605","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 11
Abstract
Since the on-line dispatch system is the primary method of prioritizing and directing the flow of work through a paperless fab, it makes sense that we place high demands on a dispatching tool. The demands were met by ASI's RTD system. The flexibility and customizability that RTD offers allows us to execute dispatch logic using real-time factory systems data. We can apply unique rules to accommodate unique tool requirements. With constantly evolving computer technology, we believe dispatching holds promising implications for the continuous improvement of wafer fabrication performance.