Feedback control circuit for biased AC electroosmosis micropump

Abstract

We have developed an integrated Complementary Metal Oxide Semiconductor (CMOS) feedback circuit for the control of micropump velocity. The whole concept is to develop a signal processing unit which is accomplished with a current-to-frequency converter circuit. The operational transconductance amplifier (OTA) was used as an amplifier, which retrieve the small current from the biased micropump and convert it to voltage. The main goal is to get a digital output corresponding to the micropump velocity which will control the integrated micropump. The signal processing unit with lower power consumption is fabricated in the 0.35 mum process. The micropump for lab-on-a-chip applications is also fabricated with MEMS (micro-electro-mechanical systems)-compatible semiconductor micro-fabrication.