Design and Fabrication of Fresnel Lenses Array

Abstract

In this work is studied the possibility to integrate a Fresnel lens array in a compact infrared spectrometer with the scope of focusing and also spectral filtering the incoming radiation, by using their inherent wavelength dependence. From the simulations results obtained with Beam propagation Method one can obtain a 3X3 array formed of two-level Fresnel lenses presenting good results regarding the focusing efficiency and the spectral response. The lens array have been fabricated by DRIE with good results regarding the etch depth control and the snoothness of the etched surfaces.