Optical excitation of micro-mechanical resonators

T. Lammerink, M. Elwenspoek, J. Fluitman
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引用次数: 14

Abstract

The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material properties. It is shown that decisive roles are played by the absorption length of the material mu , the penetration depth of a thermal wave delta , and the thickness of the resonator. delta is a function of the excitation frequency while the resonance frequency depends on h. The theory results in design rules for optothermal resonators. It is shown that absorbing layers improve the efficiency of the optothermal transduction only in the case of transparent materials. Experiments agree well with theory.<>
微机械谐振器的光激发
本文对弯曲模微机械谐振器的光热激发进行了理论和实验研究。该理论预测了诱导弯矩(模量和相位)作为激励频率、结构几何形状和材料特性的函数。结果表明,材料的吸收长度、热波δ的穿透深度和谐振腔的厚度起决定性作用。δ是激励频率的函数,而共振频率取决于h。该理论得出了光热谐振器的设计规则。结果表明,只有在透明材料中,吸收层才能提高光热转导效率。实验与理论很吻合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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