Applications of Dielectric Barrier Discharge Microplasma

Abstract

Dielectric barrier discharge microplasma is a nonthermal plasma discharge at atmospheric pressure which due to the micrometer size dielectric layer between the grounded and high-voltage energized electrodes enables to drive the device at less than 1 kV. Microplasma is an economical and ecological alternative for conventional technologies used for NOx removal, indoor air cleaning, surface treatment of polymers, biomedical applications such as transdermal drug delivery, or as an actuator. In this chapter, microplasma applications such as indoor air purification, skin treatment for drug delivery, particle removal, and flow control are presented.