High response time micro scale thermo-couple for biological applications

Abstract

We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a 2times2 mum area. Our micro TFTC shows a simulated response time of 0.35 ms when used in air (for DeltaTap55 K), and 1.5 ms when used in water (for DeltaTap41 K)