Growth of single crystal stripe in Si film on rolled flexible substrate by micro-chevron-shaped cw laser scanning

Abstract

A chevron-shaped cw-laser-induced single crystal growth in Si thin-film on rolled flexible substrate was proposed and demonstrated for roll-to-roll fabrication process. The substrate was bendable thin borosilicate glass with sputter deposited SiO2 and Si film, and was attached onto a rotating roll which rotated at a circumferential speed of 0.013 m/s during chevron-shaped cw-laser irradiation. Single grain growth was observed along laser scan direction.