XRnanotech – Recent Developments In Nanostructured X-ray And EUV Optics

A. Kubec, F. Döring
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Abstract

: Recent developments have brought significant improvements in X-ray and EUV optics and optical structures. We will discuss how this can improve current setups and measurements with added functionalities and efficiency. At
纳米技术-纳米结构x射线和EUV光学的最新发展
最近的发展带来了x射线和EUV光学和光学结构的重大改进。我们将讨论如何通过添加功能和效率来改进当前的设置和测量。在
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