Kuan-Yu Hsiao, W. Ho, Po-Yueh Cheng, C. Yeh, Ruei-Siang Sue, Yu-Tang Shen, C. Hu, Y. Deng
{"title":"Fabrication and optical characterization of ultra-thin anodic aluminum oxide nanoporous templates","authors":"Kuan-Yu Hsiao, W. Ho, Po-Yueh Cheng, C. Yeh, Ruei-Siang Sue, Yu-Tang Shen, C. Hu, Y. Deng","doi":"10.1109/ISNE.2015.7132018","DOIUrl":null,"url":null,"abstract":"In this study, the fabrication of thin porous anodic aluminum oxide (AAO) templates with controllable thickness of 400-1300 nm is demonstrated. One-step anodizing method is used to generate AAO template with hexagonal porous distributed profile. The pore diameter pore-widening and AAO barrier layer thinned down are investigated. The morphologies and pore structures of the fabricated AAO templates are characterized using FE-SEM images and the transmittance and reflective spectra.","PeriodicalId":152001,"journal":{"name":"2015 International Symposium on Next-Generation Electronics (ISNE)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 International Symposium on Next-Generation Electronics (ISNE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISNE.2015.7132018","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this study, the fabrication of thin porous anodic aluminum oxide (AAO) templates with controllable thickness of 400-1300 nm is demonstrated. One-step anodizing method is used to generate AAO template with hexagonal porous distributed profile. The pore diameter pore-widening and AAO barrier layer thinned down are investigated. The morphologies and pore structures of the fabricated AAO templates are characterized using FE-SEM images and the transmittance and reflective spectra.