Simulation of antireflective subwavelength grating structures for optical device applications

Abstract

Diffraction efficiencies of three different types of subwavelength grating (SWG) structures were simulated for optoelectronic device applications using rigorous coupled wave analysis method. The effect of height and period of SWG structures on the reflectance were investigated. Also, the internal and external reflection from the SWG structures were simulated and analyzed.