Characteristics of a Surface Conductivity Moisture Monitor for Hermetic Integrated Circuit Packages

Abstract

An in-situ surface conductivity sensor for measuring water content of hermetic package ambients is described. Results of correlation experiments with mass spectroscopy and volume-effect sensors are presented. Sensor studies of water desorption and contamination by leached ions are discussed. The surface conductivity sensor is well-suited to defining moisture levels within all types of hermetic packages.