Evaluation of the micro wobble motor fabricated by concentric build-up process

Abstract

We proposed a CB (concentric build-up) process to fabricate the electrostatic wobble motors in MEMS '94[ 11. This process features the concentric build-up of layers around a cylindrical substrate and produces three dimensional bulk structures using newly developed microfabrication technique. This time, we have successfully measured the wobbling motion and estimated key motor parameters such as rotation rate, rotor-stator gap, output torque and surface condition of stator and rotor. This method facilitated the evaluation of the motors and processes. And we have located the causes of torque deterioration.