Force measurement acting on the moving part of a linear air bearing

Abstract

A method for evaluating forces acting on the moving part of pneumatic linear bearings is proposed and is under development. The total force acting on the moving part is accurately measured as the inertial force using an optical interferometer. Then the components of the force, such as the force component depending on position and that depending on velocity, are evaluated using the least squares method. The present status of the development and future prospects are discussed.