{"title":"Commercialization of optical MEMS-volume manufacturing approaches","authors":"K. Markus","doi":"10.1109/OMEMS.2000.879601","DOIUrl":null,"url":null,"abstract":"This presentation addresses the main challenges facing the growth of optical MEMS volume manufacturing. The different process technologies and their interplay with the different classes of optical MEMS devices are presented. In addition, the challenges of establishing a manufacturing operation that can support the stringent requirements of Telecordia qualification are also discussed.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879601","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This presentation addresses the main challenges facing the growth of optical MEMS volume manufacturing. The different process technologies and their interplay with the different classes of optical MEMS devices are presented. In addition, the challenges of establishing a manufacturing operation that can support the stringent requirements of Telecordia qualification are also discussed.