{"title":"Laser Diagnostics of Radio Frequency Discharges","authors":"R. Gottscho","doi":"10.1364/lmd.1987.we1","DOIUrl":null,"url":null,"abstract":"Recent applications of laser spectroscopy to the study of plasma and plasma-surface processes are reviewed. Using laser-induced fluorescence and optogalvanic spectroscopy, measurements of concentration gradients, reaction probabilities, electric fields, and process end-points have helped to elucidate plasma-chemical mechanisms.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Topical Meeting on Lasers in Materials Diagnostics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/lmd.1987.we1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Recent applications of laser spectroscopy to the study of plasma and plasma-surface processes are reviewed. Using laser-induced fluorescence and optogalvanic spectroscopy, measurements of concentration gradients, reaction probabilities, electric fields, and process end-points have helped to elucidate plasma-chemical mechanisms.