A spatial light modulator fabricated with bionano-crystallized poly-Si film

Abstract

A spatial light modulator (SLM) was fabricated with a poly-Si film that was obtained by metal-induced lateral crystallization (MILC) using Ni nanoparticles synthesized within cage-shaped protein molecules. The MILC increased crystallinity and increased residual tensile stress in the Si film. The large tensile stress generated hard spring effect in the SLM device to expand the actuation range of the SLM. In the frequency response of the SLM, Q factor increase was observed.