A ka-band phase shifter based on a new four-state MEMS switch

Abstract

In this paper design and simulation of a 6-bit KA-Band RF MEMS phase shifter in presented. In order to combine both loaded line and switch line phase shifters, a new 4-state switch is proposed. The proposed 4-state enables 3 different phase shifting. Simulation results indicate that insertion loss is less than −2.34dB and matching is better than −16.1dB for each switching state. The coverd area is 28mm2 and actuation voltage of the switch is 8.5 volt. Rms phase error is 2.07.