Study on the structure characteristics of HgCdTe infrared detector using laser beam-induced current

X. Hong, H. Lu, D. B. Zhang
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引用次数: 0

Abstract

The structure characteristics of typical n+-on-p HgCdTe infrared detector have been studied by laser beam-induced current (LBIC). The dependence of LBIC on laser wavelength, junction depth and localized leakage has been presented. The spreading length of minority carrier of p-type region (Lsp) is extracted by the exponential decay fitting of the curve of LBIC. It is found that the peak magnitude of LBIC and junction depth approximates to a linear relationship for practical values of device fabrication. The Lsp monotonously increases with junction depth. A notable shift of LBIC profile is observed when localized leakage exists. This provides a powerful explain for LBIC applying to characterize the structure and process uniformity of HgCdTe infrared detector.
利用激光束感应电流研究HgCdTe红外探测器的结构特性
用激光束感应电流(LBIC)研究了典型的n+-on-p HgCdTe红外探测器的结构特性。给出了LBIC与激光波长、结深和局域泄漏的关系。通过LBIC曲线的指数衰减拟合,提取了p型区少数载流子的扩展长度Lsp。对于器件制造的实际值,LBIC的峰值大小与结深近似成线性关系。Lsp随结深的增加而单调增加。当局部泄漏存在时,LBIC曲线会发生显著的变化。这为LBIC用于表征HgCdTe红外探测器的结构和工艺均匀性提供了有力的解释。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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