D. Knoll, S. Lischke, A. Awny, M. Kroh, E. Krune, C. Mai, A. Peczek, D. Petousi, S. Simon, K. Voigt, G. Winzer, R. Barth, L. Zimmermann
{"title":"High-performance BiCMOS Si photonics platform","authors":"D. Knoll, S. Lischke, A. Awny, M. Kroh, E. Krune, C. Mai, A. Peczek, D. Petousi, S. Simon, K. Voigt, G. Winzer, R. Barth, L. Zimmermann","doi":"10.1109/BCTM.2015.7340583","DOIUrl":null,"url":null,"abstract":"Photonic BiCMOS is a novel technology for fabricating electronic-photonic integrated circuits. Broadband silicon photonics devices such as germanium photodiodes and depletion type Mach-Zehnder modulators were monolithically integrated in a high performance SiGe BiCMOS baseline process. Integration aspects and first examples of demonstrator circuits shall be reviewed.","PeriodicalId":126143,"journal":{"name":"2015 IEEE Bipolar/BiCMOS Circuits and Technology Meeting - BCTM","volume":"14 12","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Bipolar/BiCMOS Circuits and Technology Meeting - BCTM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BCTM.2015.7340583","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13
Abstract
Photonic BiCMOS is a novel technology for fabricating electronic-photonic integrated circuits. Broadband silicon photonics devices such as germanium photodiodes and depletion type Mach-Zehnder modulators were monolithically integrated in a high performance SiGe BiCMOS baseline process. Integration aspects and first examples of demonstrator circuits shall be reviewed.