High-performance BiCMOS Si photonics platform

D. Knoll, S. Lischke, A. Awny, M. Kroh, E. Krune, C. Mai, A. Peczek, D. Petousi, S. Simon, K. Voigt, G. Winzer, R. Barth, L. Zimmermann
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引用次数: 13

Abstract

Photonic BiCMOS is a novel technology for fabricating electronic-photonic integrated circuits. Broadband silicon photonics devices such as germanium photodiodes and depletion type Mach-Zehnder modulators were monolithically integrated in a high performance SiGe BiCMOS baseline process. Integration aspects and first examples of demonstrator circuits shall be reviewed.
高性能BiCMOS Si光电子平台
光子BiCMOS是一种制造电子-光子集成电路的新技术。宽带硅光子器件如锗光电二极管和耗尽型马赫-曾德尔调制器在高性能SiGe BiCMOS基线工艺中进行了单片集成。将回顾集成方面和演示电路的第一个例子。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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