Planar aluminiurn multilevel interconnection formed by electrochemical anodizing technique

Abstract

This report describes a multilevel inter-connection technology based on selective electrochemical anodizing of aluminium and its alloys. In accordance with this technology, local areas into Al layer are transformed to insulating anodic alumina by low temperature electrochemical oxidation. Selective anodizing technique provides possibility to produce following components of planar multilevel inter-connections.