T. Takayama, Y. Ohno, Y. Goto, A. Machida, M. Fujita, J. Maruyama, K. Kato, J. Koyama, S. Yamazaki
{"title":"A CPU on a plastic film substrate","authors":"T. Takayama, Y. Ohno, Y. Goto, A. Machida, M. Fujita, J. Maruyama, K. Kato, J. Koyama, S. Yamazaki","doi":"10.1109/VLSIT.2004.1345496","DOIUrl":null,"url":null,"abstract":"A CPU using a high performance poly-silicon TFT is successfully fabricated on a plastic film substrate by a TFT transfer technology onto a plastic film substrate we developed. No performance degradation by the transfer process was observed, and we confirmed the CPU operation at the frequency of more than 10MHz with a power source voltage 33V.","PeriodicalId":297052,"journal":{"name":"Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004.","volume":"73 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"23","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIT.2004.1345496","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 23
Abstract
A CPU using a high performance poly-silicon TFT is successfully fabricated on a plastic film substrate by a TFT transfer technology onto a plastic film substrate we developed. No performance degradation by the transfer process was observed, and we confirmed the CPU operation at the frequency of more than 10MHz with a power source voltage 33V.