Structural optimization of 273nm deep ultraviolet laser in wave guide

Abstract

The full width at half maxima (FWHM) of the LDs is very narrow, with small threshold current and high luminous power. Through simulation, it can be seen that the radiation recombination rate and wave intensity of different lateral positions of LDs are different. The waveguide layer of the high Al composition has a lower refractive index and can reduce the divergence angle of light. In this paper, the device structure is optimized by gradually increasing the Al component toward the p-cladding layer and decreasing the Al component toward p-side. Compared with the original structure, the grading wave guide proves that it can have better electrical characteristics and the FWHM is smaller.