Joshua Fabian, Wesley Cassidy, L. Hill, Kassandra Hawes, David Neilson, Adan Azem, Xiruo Yan, Donald Witt, Matthew Mitchell, A. Pfenning, L. Chrostowski, Jeff F. Young
{"title":"Post-fabrication trimming of high Q/V silicon photonic slot-bridge nanobeam cavities","authors":"Joshua Fabian, Wesley Cassidy, L. Hill, Kassandra Hawes, David Neilson, Adan Azem, Xiruo Yan, Donald Witt, Matthew Mitchell, A. Pfenning, L. Chrostowski, Jeff F. Young","doi":"10.1109/ipc53466.2022.9975522","DOIUrl":null,"url":null,"abstract":"We demonstrate post-fabrication trimming of individual silicon photonic slot-bridge nanobeam cavities using laser-assisted local surface oxidization. A permanent blue-shift of the fundamental resonance of up to 6 nm is observed, while the quality factor is enhanced by 54 % from 8100 to 12500.","PeriodicalId":202839,"journal":{"name":"2022 IEEE Photonics Conference (IPC)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE Photonics Conference (IPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ipc53466.2022.9975522","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrate post-fabrication trimming of individual silicon photonic slot-bridge nanobeam cavities using laser-assisted local surface oxidization. A permanent blue-shift of the fundamental resonance of up to 6 nm is observed, while the quality factor is enhanced by 54 % from 8100 to 12500.
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