MANUFACTURING TECHNOLOGY FOR TWO-COORDINATE SENSITIVE SEMICONDUCTOR DETECTORS BASED ON LARGE-DIAMETER SINGLE-CRYSTAL SILICON

R. Muminov, A. Saymbetov, Y.Q. Toshmurodov, M.O. Yavqochliyev
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Abstract

The article presents the main results o f the manufacturing technology o f Si(Li) two- coordinate sensitive nuclear radiation detectors based on single-crystal silicon with the dimensions o f the numerical region 50*50 mm and with eight current-collecting bands o f 1.5 mm
基于大直径单晶硅的二坐标灵敏半导体探测器制造技术
本文介绍了基于单晶硅的Si(Li)二坐标灵敏辐射探测器的制造技术的主要成果,该探测器的尺寸为50*50 mm, 8个集流带为1.5 mm
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