Generation mechanism and suppression technique of laser scatter bright stripe on mirror surface

Abstract

The laser gyro mirrors were detected by laser scatterometer. It showed that the laser scattering of the mirror was large when there were different degrees of scatter bright stripes on the surface of the mirror. In this paper, based on the subsurface damage model of polishing, the whole process from polishing, cleaning and coating was studied, and the deep mechanism of the laser scatter bright striper was revealed. By improving the process technology, mirrors with small scatter spot and no scatter bright stripe were prepared.