Amplitude and phase measurement of surface acoustic waves within a saw filter having fan-shaped transducers and numerical simulations

Abstract

.� A new method of laser heterodyne interferometry is applied to the phase measurement of surface acoustic waves within a SAW filter having fan-shaped transducers on a 128Y-X LiNbO3 substrate. As a result, it is clarified that the standing waves inside the fan-shaped transducer move towards the open end of the fan, resulting in several diffraction beams. Furthermore, a simple numerical simulation concerning the wave propagation and electrical characteristics of a SAW filter