Piezoelectric Glass-Ceramics as Low Temperature-Coefficient SAW Substrate Materials

Abstract

Surface acoustic wave (SAW) properties of piezoelectric glass-ceramics based on fresnoite (Ba,Si,TiO,) are examined in this paper. Fresnoite-based formulations are prepared initially in the glass form, then thermally processed to produce glass-ceramics having a well-oriented fibrous grain structure at the surface; this surface region is piezoelectric owing to the fact that the surface region has olar as well as crystallo