Torsional mirror with an electrostatically driven lever-mechanism

Abstract

This report proposes a novel torsional mirror. The optical performance of the torsional mirror is improved through the refining of the mechanical design. SEM shows the design of the torsional mirror containing a mirror plate and its driving mechanism-the electrostatic torque generator. Hence, the scanning angle of the mirror is magnified by torque generators. In addition, the scanning frequency of the mirror can reach 17.7 kHz, and the stiffness of the mirror plate is remarkably increased by the folded frame.