On Prognosis of Growth of Film by Pulsed Laser Deposition and Influence of Variation of Parameters on Technological Process

E. Pankratov
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Abstract

In this paper, we consider an analytical approach for analyzing film growth by pulsed laser deposition. The approach gives a possibility to analyzed the considered technological in more common case. The influence of the parameters of the growth process on the growth of films is investigated.
脉冲激光沉积薄膜生长预测及参数变化对工艺过程的影响
本文考虑了一种分析脉冲激光沉积薄膜生长的分析方法。该方法提供了在更常见的情况下分析所考虑的技术的可能性。研究了生长过程参数对薄膜生长的影响。
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