TEOS plasma polymerized films: Impact of clustered material in humidity measurement

L. Hernandez, M. L. P. Da Silva, R. R. Lima, V. F. Cardoso
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引用次数: 0

Abstract

This work aims to humidity and VOCs measurement using TEOS films or TEOS/HFE composites. Films, exposed or not to ultraviolet, were tested on cycles of relative humidity ranging from 25% to 85% and VOCs interference were also evaluated. TEOS films showed good reproducibility up to 85% relative humidity but quick reaction on 90%. The best detection limit was 100 ppm, using TEOS films exposed to UVC and TEOS/HFE composites show sensitivity of 4 Hz/% humidity, but interdigitated electrodes quickly saturate. VOCs were detected in the 1% w/w in air and do not interfere in the relative humidity detection.
TEOS等离子体聚合膜:聚集材料在湿度测量中的影响
这项工作旨在使用TEOS薄膜或TEOS/HFE复合材料测量湿度和VOCs。在相对湿度为25%至85%的循环条件下,对暴露于或未暴露于紫外线下的薄膜进行测试,并评估挥发性有机化合物的干扰。TEOS薄膜在85%的相对湿度下具有良好的重现性,在90%的相对湿度下反应速度快。最佳检测限为100 ppm,使用TEOS薄膜暴露于UVC和TEOS/HFE复合材料显示灵敏度为4 Hz/%湿度,但交叉电极迅速饱和。在1% w/w的空气中检测到VOCs,不干扰相对湿度的检测。
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