Heat transfer estimation during laser-assisted metal-induced crystallization of amorphous silicon films

L. D. Volkovoynova, I. Kozhevnikov, A. Pavlov, A. Serdobintsev, A. Starodubov
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Abstract

The article provides a simple estimate of the transfer of thermal energy to amorphous silicon from an aluminum layer in the process of laser-metal-induced crystallization of amorphous silicon.
激光辅助金属诱导非晶硅薄膜结晶过程中的传热估计
本文对激光金属诱导非晶态硅结晶过程中从铝层向非晶态硅传递的热能进行了简单估计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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