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Accelerometers production technological process decomposition parameters model

2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) Pub Date : 2016-04-20 DOI:10.1109/MEMSTECH.2016.7507506
Igor Nevlydov, V. Yevsieiev, S. Miliutina, V. Bortnikova
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引用次数: 1

Abstract

In this paper the accelerometer production technological process parameters decomposition model is described.
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加速度计生产工艺流程分解参数模型
本文描述了加速度计生产工艺过程参数分解模型。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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来源期刊
2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)
2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)
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