Optical scanner with deformable mirror fabricated from SOI wafer

Abstract

An optical scanner with a deformable mirror is fabricated using SOI wafer. A 1 mum thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80 V. The deformation at the mirror center is 3 nm at 100 V.