Phyo Lin, J. Randi, S. DeFrances, D. Bernot, J. Talghader
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引用次数: 0
Abstract
SiO2 nano-columnar films were fabricated using oblique angle deposition and characterized for their optical and mechanical properties. The films showed high damage thresholds, low scattering, and an intriguing transition to low stress at lower densities.
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