Fabrication of GaSb Microdisc Resonator on Silicon Substrate by Rapid Melt Growth Process

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925165

Ming-Chang M. Lee, C. Cheng, Cheng-Yu Lin, Yi-Syue Wun, Pawan Mishra

引用次数: 1

Abstract

We studied using rapid melt growth (RMG) method to make GaSb microdisks on Si substrate. By optimizing the process condition, we observe a strong photoluminescence.

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用快速熔体生长法在硅衬底上制备GaSb微盘谐振器

研究了用快速熔体生长(RMG)法在Si衬底上制备GaSb微盘。通过优化工艺条件，观察到较强的光致发光。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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