Bent multilayer LTCC modules for sensor applications

Abstract

The potential of Low Temperature Cofired Ceramic (LTCC) multilayer technology allows to realize different structures for sensor applications. Examples of sensors realized at the Department of Hybrid Microelectronics Technical University in Kosice have shown the quality of being potential or the possibility of developing of LTCC for wide field of thick film sensor applications and for bent multi-layer LTCC modules and their application in thick film pressure sensors. LTCC is a technology suitable for design flexibility comparing with conventional thick film, thin film and high-temperature cofired technologies in electronics. Authors of this paper introduced the concept of using the bent multi-layer LTCC modules in unconventionally shaped electronic devices or in the field of sensors.