Electron Beam Stimulated Oxidation of Carbon (EBSOC)

Abstract

The patterning of carbon nanostructures by electron beam stimulated oxidation is described. Sputter deposited carbon thin films and carbon nanotubes are locally oxidized in a scanning electron microscope using injected water vapor. The resulting structures are examined with scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Electrical resistance obtained post-processing is comparable to as-deposited values. Etched linewidths on the order of 20nm are demonstrated along with sub-2nm wide carbon wires.