Pollution monitoring sensor for a Micro-Factory

Abstract

On the market there are many systems for particle sizing and counting, but unfortunately no one meets the parameters to be integrated into the Micro-Factory (FM) concept. For this reason pollution-monitoring sensor which meets the conditions of MF applications is under development. A MF is a new approach to producing and assembling products having a size of millimetres or microns. A MF is based on a modular concept of several operation units, each having a size of 1dm3, customer-defined conditions (temperature, humidity), and a clean room environment. The detection system is designed to detect each single particle passing through the chamber. It is a hybrid system combining two different detection principles. Both principles are dedicated to detecting particles of a different size. The detection of particles ranging from a size of 100 microns to 10 microns can be achieved using the first method, while the second method can succeed the detection of pollutants having a size of 0.5 micron.